正在分析“[{"ID":"989048","TagID":"40854","ProductsID":"6056750","Name":"精密光学影像测量仪 VIEW MicroLine 300","Type":"","Detail":"

MicroLine-300是一款桌上型半自动CD测量系统。主要技术参数:◆    测量范围(XYZ):标准:200×200×25mm;可选:300x300x25◆    视场内测量精度:10nm(100X 镜头);Z轴聚焦范围:25 mm◆    视场内测量范围:0.5um~400um;◆    视场内测量重复性(100x 物镜):  晶圆上<0.010um(1δ);                                                     掩模板上0.005um(1δ);   

◆    承重:2kg

◆    标配镜头10x,可选镜头:5X, 20X, 50X, 100X 

MicroLine 300 is a table type semi-automatic CD measurement system .