正在分析“[{"ID":"989048","TagID":"40854","ProductsID":"6056750","Name":"精密光学影像测量仪 VIEW MicroLine 300","Type":"","Detail":"
MicroLine-300是一款桌上型半自动CD测量系统。主要技术参数:◆ 测量范围(XYZ):标准:200×200×25mm;可选:300x300x25◆ 视场内测量精度:10nm(100X 镜头);Z轴聚焦范围:25 mm◆ 视场内测量范围:0.5um~400um;◆ 视场内测量重复性(100x 物镜): 晶圆上<0.010um(1δ); 掩模板上0.005um(1δ);
◆ 承重:2kg
◆ 标配镜头10x,可选镜头:5X, 20X, 50X, 100X
MicroLine 300 is a table type semi-automatic CD measurement system .